Optical and electrical properties of RF magnetron sputtered ZnO thin films deposited at different substrate temperatures

G.Anil Kumar, M.V.Ramana Reddy, R.Sayanna, Katta Narasimha Reddy

Zinc oxide (ZnO) thin films were deposited on glass substrates by radio frequency magnetron sputtering using pure zinc oxide target. The effect of substrate temperature on the structural, morphological, optical and electrical properties of ZnO films were systematically investigated by X-ray diffraction, UV-Visible spectrophotometer and Hall effect measurements.  All these films exhibited strong (002) diffraction peaks corresponding to hexagonal wurtzite structure. The ZnO films formed at substrate temperature of 473K exhibited optical transmittance of 93% and electrical resistivity of 6.8 × 10⁻² Ω cm.